Signal point interconnection routing

ABSTRACT

Active components, such as logic gates or flip-flops, formed in a semiconductor substrate are interconnected to input/output bonding pads and other active components in a circuit array in four separate operations. First, after arranging the active components in rows, signal points of all components in one row are interconnected by considering the longest interconnection and proceeding to the shortest. Next, component signal points between rows are interconnected again by considering the longest interconnecting path and proceeding to the shortest path. Third, input/output component signal points are assigned to input/output conductive pads. Finally, interconnecting paths are completed between the input/output component signal points and an assigned pad in a numbered order. Each operation uses a distinct algorithm to complete the necessary steps.

United States Patent Computer-Aids Speed Discretionary Wiring," Electronic Design 24, Nov. 21, 1968; John Hanne; pp. Cl l- Cl6.

An Efficient Heuristic Procedure for Partitioning Graphs," The Bell System Technical Journal Vol. 49, Feb. l970, Number 2; Kernighan and Lin; pp. 291- 307. I

Primary Examiner-Malcolm A. Morrison Assistant Examiner Edward 1. Wise Attorneys.lames 0. Dixon, Andrew M. Hassell, Harold Levine, Mel Sharp, John E. Vandigriff, Henry T. Olsen and Michael A. Sileo, .lr.

ABSTRACT: Active components, such as logic gates or flipflops, formed in a semiconductor substrate are interconnected to input/output bonding pads and other active components in a circuit array in four separate operations. First, after arranging the active components in rows, signal points of all components in one row are interconnected by considering the longest interconnection and proceeding to the shortest. Next, component signal points between rows are interconnected again by considering the longest interconnecting path and proceeding to the shortest path. Third, input/output component signal points are assigned to input/output conductive pads. Finally, interconnecting paths are completed between the input/output component signal points and an assigned pad in a numbered order. Each operation uses a distinct algorithm to complete the necessary steps.

I" 1 PAD ASSIGN.

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sum 6 or 9 ESTABLISH NEW COORDINATE SYSTEM 37g- LOCATE ALL X-COORDINATES OF INTER-ROW CONNECTING /9f SIGNAL POINTS WITH RESPECT TO THE COORDINATE SYSTEM MAKE A LIST OF THESE CONSIDER INTERCONNECTIONS wmcw 1ST CONNECTION INCLUDES X-COORDINATES IN LIST OF END POINTS OF CONNECTION CONSIDER NEXT CONNECTION IN LIST ASSIGN THIS CONNECTION TO CATEGORY 1 IS THIS THE LAST CONNECTION IN LIST? CAN THIS CONNECTION BE MADE IN A 1ST ROW CHANNEL WITHOUT BLOCKING ANOTHER UNCONNECTED SIGNAL POINT ON THAT ROW? ASSIGN THIS CONNECTION TO CATEGORY 2 ASSIGN THIS CONNECTION TO CATEGORY 3 PAramsnunv 16 ml 3.621.208

SHEEI 7 BF 9 c Hg 80 SORT EACH CATEGORY BY LENGTH OF CONNECTION X LONGEST L528 TO SHORTEST CONSIDER 329 1ST CATEGORY OF CONNECTIONS 330 CONSIDER 1ST ROW coNsI CONSIDER 1ST 33/ UNUSED CHANNEL 2ND Row ON THAT ROW CONSIDER A 2ND CATEGORY ASSIGN 1ST CONNECTION IN N LIST OF CATEGORY IN CONSIDERATION WAS 335 TO THIS CHANNEL YES THIS 2ND CATEGORY? THIS THE LAST CONNECTION IN THIS CATEGORY? ARE ALL CONNECTIONS IN CATEGORY ASSIGNED TO A CHANNEL? CONSIDER NEXT CONNECTION 338 IN CATEGORY CONSIDER NEXT HIGHEST NUMBERED CHANNEL 15 33.9 I f THIS CONSIDER CONNECTION YES 1ST CONNECTION ALREADY IN LIST ASSIGNED CHANNEL? CAN THIS CONNECTION BE MADE IN CHANNEL BEING CONSIDERED WITHOUT OVERLAPPING OTHER CONNECTIONS ALREADY MADE IN CHANNEL? ASSIGN THIS CHANNEL NO.

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saw 9 or 9 Fig. 8F Flu II J I x FIND THE LowEsT Y-cooRDINATE (CHANNEL) ON THIS ROW INTO wHIcH THIS CONNECTION cAN BE PLACED WITHOUT OVERLAPPING OTHER CONNECTIONS ALREADY MADE IN CHANNEL WILL THE CONNECTION BLOCK AN UNCONNECTED SIGNAL POINT ON ROW 1? ASSIGN THIS Y-cooRDINATE (CHANNEL) TO THIS CONNECTION PRINT A WARNING MESSAGE IS 'PASS' EQUAL TO 2? IS THIS CONNECTION CONSIDER N0 ALREADY NEXT THIS THE ASSIGNED CONNECTION LAST CONNECTION A IN LIST IN LI ST? CHANNEL? ARE ALL A r CONNECTIONS CONSIDER IN CATEGORY 1ST CONNECTION PASS 2 3 ASSIGNED IN LIST A CHANNEL? END SIGNAL POINT INTERCONNECTION ROUTING This invention relates to integrated circuitry, and, more particularly, to an integrated circuit and interconnecting paths between components and between input/output signal points and bonding pads.

Heretofore, many of the techniques used for establishing the interconnections for active components in a semiconductor substrate in a circuit array and the interconnecting paths between components and input/output bonding pads has resulted in inefficient use of the substrate area. Considerable space was left vacant because of the order in which the many interconnecting paths were established. Basically, previous routing techniques considered the shortest interconnections first and the longest last. The same inefficient use of space also resulted when establishing-paths between input/output signal points and input/output bonding pads.

An object of the present invention is to provide an integrated circuit having a component interconnection pattern that minimizes unused substrate area. Another object of this invention is to provide a method of circuit layout for reducing the substrate area required in producing a given integrated circuit. A further object of this invention is to provide a method for improving the yield of acceptable units in the fabrication of integrated circuitry by the use of accurate artwork that reduces substrate area to a minimum. A still further object of this invention is a method of designating a set of circuit masks including interconnecting active components in an integrated circuit on a length basis.

In accordance with this invention, after all the active components for a selected system have been located in parallel rows, the active components in a given row in the circuit array are interconnected by a routing'technique that attempts to minimize the number of channels required for placing the conductor paths. The interconnecting paths are considered in an order of descending length. A series of passes may be required to complete the interconnection of signal points arranged in a given row. Each pass assigns interconnecting paths to the next highest numbered channel from the preceding pass, starting from the first channel adjacent the component row. Each pass also starts by considering the longest remaining interconnection to be made and proceeds to the shortest. The total number of passes required for completing the intrarow connections is that necessary to completely interconnect the signal points on a row basis. Next, a routine is run to interconnect signal points between components arranged on different rows in the circuit array. The basic algorithm for establishing the interconnecting paths between signal points on different rows is to proceed from the longest interconnection to the shortest; it having been previously established that the path does not interfere with the interconnection to another signal point. Again, a number of passes are made with each subsequent pass establishing interconnecting paths in the next highest numbered channel from the preceding pass.

After all signal points in and between rows in an array have been interconnected, the input/output signal points are assigned to bonding pads. Assignment of component input/output signal points to the input/output bonding pads proceeds using the algorithm of the angular difference between the polar angle, relative to a polar coordinate center, established by the azimuth of the input/output point and a reference axis and a polar angle, relative to the same center, established by the azimuth of an input/output pad and the reference axis. Again a sequence of passes will be required. In the first pass all input/output signal points are assigned to individual bonding pads if the angular difi'erence is less than a first threshold angle. For each subsequent pass, the threshold angle is increased. This continues until all the input/output signal points have been assigned an input/output pad. After completing the assignment of pads to signal points, a channel stacking routing technique interconnects the signal points to the assigned pad. This channel stacking routing routine consists of a number of passes wherein the lowest numbered signal point, not previously considered in a pass, is interconnected with its assigned conductive pad, using the lowest numbered channel external to the array, on a space-available basis, if the interconnecting path provides space for establishing an interconnection to any other signal point and its assigned pad. Each pass begins with the lowest numbered unassigned point and continues establishing interconnecting paths in a particular numbered channel. This continues until all input/output signal points have been interconnected with the assigned bonding pad.

After the various routines have been run to assign the input/output signal points to bonding pads, and to interconnect signal points in rows and between rows, pattern masks are generated for the fabrication of an integrated circuit. In a metal-oxide-semiconductor (MOS) configuration, the source and drain of the active components and parts of the interconnecting paths are fonned by diffusion into a semiconductor substrate covered by a silicon dioxide insulating layer. A circult of this type may be formed with as few as four mask patterns. One mask outlines the active component areas and the interconnecting paths formed by diffusions in the semiconductor substrate. A second mask defines the thin oxide regions beneath the gate metal. A third mask defines feedthrough areas through the insulating layer to interconnect the metal parts to the difiused parts. A fourth mask outlines the metal interconnecting paths overlaying the oxide insulating layer and the gates of the MOS devices.

A more complete understanding of the invention and its advantages will be apparent from the specification and claims and from the accompanying drawings illustrative of the invention.

Referring to the drawings:

FIG. 1 illustrates the routine for of interconnecting in the same row;

FIG. 2 illustrates the routine for generating representations of interconnecting paths between signal points of active components located on different rows;

FIG. 3 illustrates the routine for assigning input/output component signal points to input/output component pads;

FIG. 4 illustrates the routine for interconnecting input/output component signal points to the individual assigned input/output component pads;

FIG. 5 is a block diagram of a system for utilizing various routines to generate a set of mask patterns;

FIG. 6 is a complete layout of the active components and interconnecting paths for a metal-oxide-semiconductor integrated circuit;

FIG. 7 is a perspective view, partially cut away, of a metaloxide-semiconductor integrated circuit fabricated from masks generated by the routines of the present invention; and

FIGS. 8A-F are flow charts illustrating the method of signal point interconnection routing in accordance with the present invention.

Referring to FIG. 1 when read in conjunction with the flow charts of FIGS. 8A-C, after all the active circuit components A through M have been located in a series of rows by a routine that considers the length of interconnecting leads, a subroutine for interconnecting signal points of components located in a given row is considered. Initially, coordinate systems are established 300 to locate the signal points to be interconnected. Signal points on row 50 are located 301 with respect to an x -axis 88 and a y-axis 90. Signal points on row 52 are located with respect to an x -axis 92 and the y-axis 90. After all the signal points on the row 50 have been located with respect to the coordinate axis system, a list is made 302 of the interconnections starting 303 with the longest interconnection and proceeding to the shortest interconnection. Similarly, a list of interconnections for the signal points on row 52 will be made, again starting with the longest and proceeding to the shortest. Each interconnection in both rows will include the x and y coordinates for the end points, which establishes the length of the interconnection. For row 50, the information required by an automatic data processor is given in table I. For the components on row 52, the same information is given in table II.

generating representations paths between points of active components TABLE I Interconnection y .r,

l 2-15 y .r

yls "l5 l 3 y n u )ls i: 8-9 y, x,

.YI 'i:

TABLE ll Interconnection y .t,

y" -"u -21 y x Yn n 24-25 y x,

First 304, representations of interconnecting paths for signal points located in row 50 will be generated and stored. Referring to table 1, the longest interconnecting path will be considered first. The longest path listed is the interconnection between signal point 12 and signal point 15. This will be located in the first available stacking channel 305 and 306. After generating and storing the representation of the interconnecting path between the signal points 12 and 15, the routine considers 311 the next longest interconnecting path. The next path to be considered 314 will be that interconnecting signal point 11 to signal point 13. This interconnection, however, cannot be made 315 in the first signal channel, the channel under consideration, due to the previously established interconnecting path 94 between points 12 and 15. Thus, the path between signal points 11 and 13 will be disregarded in the first pass. The routine will then consider 307, 311, 314 and 315 the interconnection between the signal points 8 and 9. Although this is the shortest signal path given in the table 1, it is the only one remaining in the table that can be fit into the channel under consideration. A representation of an interconnecting path 96 between signal points 8 and 9 will thus be generated and stored 316.

After all the interconnections in row 50 have been considered 307 and 308 on the first pass and either assigned an interconnecting path or disregarded, a second pass will be made where the next highest numbered channel will be considered 312. In the simple example of FIG. 1, only the interconnection between signal points 11 and 13 remains to be connected 313. This will be placed in the next highest numbered channel from the path 94. Thus, in the second pass a representation of the interconnecting path 98 between signal points 11 and 13 will be generated and stored 316.

1f additional interconnections on row 50 remained in Table 1, additional passes may be required 307. In each pass, the longest remaining interconnecting path is considered first and proceeds to the shortest path remaining. Those interconnections not fitting into the channel under consideration will be disregarded for a particular pass. By considering the longest connections first, fewer stacking channels will be required to complete all connections in a given row.

Next, 309 and 310 the component signal points in row 52 will be interconnected. Referring to the table 11, it will be noted that the longest interconnecting path is between signal points 17 and 19. In the first pass 305 for interconnecting components in the row 52, a representation of the interconnecting path 100 will be generated and stored 316. In the same pass, an interconnecting path 102 can be established between signal points 20 and 21. Finally, the path 104 interconnecting points 24 and 25 will be established in the first pass. Note, that although the routine considers the longest unassigned interconnection first, it also considers placing interconnecting paths on a space-available basis 315 in the channel under consideration. Again, in row 52 as in row 50, the interconnections are considered 312 and 313 in subsequent passes, if needed 314, starting with the longest unassigned path and proceeding to the shortest.

The next routine for generating and storing representations of interconnecting paths establishes interconnections between signal points located on different rows. Referring to FIG. 2, component signal points on row 50 are interconnected to component signal points on row 52. Initially, an x and y coordinate axis system is established 317 and a list 319 made of the coordinates of each of the various signal points. Further, a list is constructed of three categories of interconnecting paths giving the signal points for each interconnecting path starting with the longest interconnection and proceeding to the shortest for each of the three categories.

The first category 323 of the numbered list includes all interconnections that can be made in channels associated with the row 50. For the second category 326, the interconnections between rows will be listed where the paths are placed in a channel associated with the row 52. In the last category 327, all interconnections which cannot be definitely placed in the channels either associated with row 50 or 52 will be listed. All three categories list interconnections starting from the longest and proceeding to the shortest.

To determine whether a given connection 320 is a category one, category two or category three type, the subroutine considers whether an interconnecting path between two points can be made in channels associated with row 50 without blocking 324 off any other signal point. Consider the interconnection between the signal points 10 and 22; if this path is established in the next available channel after completion of the intrarow routine, the signal point 14 will be blocked and the interconnection between signal points 14 and 18 cannot be made. Thus, the interconnection 110 is not a category one connection. Category one interconnections of FIG. 2 include the path between points 14 and 18 and the path between points 16 and 23.

After all category one 322, 321 and 324 interconnections have been listed, the routine next considers category two interconnections. The same test is applied, that is, whether an interconnecting path placed in a channel associated with row 52 will interfere 325 with establishing an interconnection to any other signal point. Again considering interconnection 110, this will be a category two 326 interconnection and the path will be located in a channel associated with row 52. Category three interconnections will be a listing of those which cannot be placed in either category one or category two 327 because it is uncertain whether or not they would interfere with a connection to any other point. In the example of FIG. 2, no category three interconnections exist.

After establishing the three categories of interconnections, the routine next generates representations of the interconnections listed in category one 329. These interconnections will be considered starting from the longest and proceeding to the shortest 328. The first channel to be considered 329, 330 and 331 will be channel 3 of row 50, that is, the first unused channel 331 after establishing interconnections between signal points located on the same row 330. First, the interconnection between the signal points 14 and 18 will be considered to determine if it can be established in the conductor channel 3. Since this is the longest category one interconnection, it will be established 332 in channel 3. The next interconnection to be considered 338 is that between signal points 16 and 23. The controlling factor for determining the next interconnection to be considered is on the basis of length. The interconnection between signal points 16 and 23 will also be established in the third conductor channel, and a representation of a path 108 will be generated and stored 341 for future pattern fabrication.

passes needed for category one will depend on the number of interconnections required.

'l'lpon completion 333 and 334 of all category one interconnec tions,-the routine next considers category two 335, 336

and 337, interconnections. Again, they will be considered 328 on a length basis from the longest and continuing to the shortest. in the example given, only the interconnection between signal point and 22 is listed in category two. A representation of an interconnecting path "0 will be generated and stored 341 in the first available conductor channel from the row 52. For category two interconnections, additional passes 358 will be made, if needed 334, to place additional interconnections in higher number conducting channels until 333 all interconnections have been completed.

Finally, interconnections in category three 342 will be considered. After placing the connections for category one and category two, many of the interference problems that determined a given connection to be in category three will have been eliminated, Category three interconnections are then placed 343-356 starting with the lowest numbered channels until all interconnections have been made in a manner similar to that of categories one and two.

As an alternative, another subroutine may be employed for generating and storing representations of interconnecting paths between signal points located on different rows. This alternative method is the same as category one of the previous example (328-334, 338-341, and 357-358 of FIGS. BA-C) except all connections are considered as a single category. Again referring toFlG. 2, component signal points on row 50 are interconnected to component signal points on row 52. Initially,an x and y coordinate axis system is established and a list made of the coordinates of each of the various signal points.

Further, a number list is constructed giving the signal points for each interconnecting path starting from the longest interconnection and proceeding to the shortest.

in all the interconnecting path routines, the same conductor channels are employed. Again, the highest numbered unused channel is considered in the first pass for interconnecting signal points located in different component rows. For the three interconnections illustrated in FIG. 2, table II] lists the connections in order of length giving the x and y coordinates The longest interconnecting path is that between signal point 10 and signal point 22. The first channel to be considered will be channel 3, that is, the first unused channel after establishing interconnections between signal points located on the same row. A path between the signal point 10 and the signal point 22 will be established in channel 3 if the interconnecting path provides space for establishing interconnections to all intervening signal points. Thus, the subroutine checks all the unassigned signal points in row 50 and all the unassigned signal points in row 52 to determine if an interconnecting path in channel 3 between signal points 10 and 22 will prevent connection thereto. In making this check, for the path between points 10 and 22, it will be determined that establishing a path in channel 3 will prevent an interconnection to signal point 14. Under these circumstances, the interconnection between signal points 10 and 22 will be disregarded in the first pass. Next, the interconnection between the signal points 14 and 18 will be considered to determine if it can be established in the conductor channel 3. Again, an investigation will be made to determine if a path in channel 3 will prevent a connection to an intervening signal point. In this case, a representation of the conducting path 106 will be established.

Continuing with the list of table ill, the next interconnection to be considered is that between signal points 16 and 23. This will be established in the third conductor channel, and a representation of a path 108 will be generated and stored for future pattern fabrication.

After considering all the interconnections in the first pass on a space-available basis, a second pass will be made to consider establishing the unassigned interconnections in the fourth conductor channeljln the simple example given, only the interconnection between signal points 10 and 22 remains. Thus, an interconnecting path 110 will be generated and stored in the second pass. The number of passes needed will depend on the number of interconnections required. Each pass will consider a next highest numbered conductor channel and consider all unassigned paths starting from the longest and proceeding to the shortest.

Referring to FIG. 3, the array of active component elements, such as logic gates or flip-flops, are arranged in rows 50 and 52. In each of the rows 50 and 52, the active components are represented by various size rectangular blocks. Of the blocks A through G in row 50, blocks C, F and G have input/output component signal points to be interconnected to bonding pads outside the array illustrated. Similarly, of blocks H through M of row 52, blocks H, I and L have input/output component signal points to be interconnected to bonding pads outside the array illustrated.

To be interconnected to circuitry other than that illustrated, the various input/ output component signal points must be tied to input/output'bonding pads arranged around the periphery 54 of the circuit array. It should be understood that FIG. 3 represents a hypothetical case and in actual practice the input/output bonding pads may all be arranged along the top and bottom of the array. For purposes of explaining the invention, however, the conductive pads are shown randomly spaced around the periphery. Also, they are illustrated as located along the component edge. This is a temporary location for purposes of completing the assignment routine.

To form an interconnecting path between a given input/output component signal point and a bonding pad, the first step is to assign each signal point to an individual pad. This is accomplished by first preparing a polar coordinate system including an x-axis 56 and a y-axis 58. Next, each of the input/output component signal points 1-7 are positioned located by a polar angle established by a line extending through the polar coordinate center and the signal point anda reference axis. For example, signal point 1 is located by an angle 11,. in addition to the signal points, the input/output bonding pads 60-74 are also located by a polar angle, again relative to the same center and reference axis as the signal points. Note, that the pads 60 through 74 are temporary locations for purposes of completing the routine and are not intended to represent an actual pad.

After each of the signal points I-7 and the pad locations 60-74 have been located by a polar angle, an assignment of a particular pad can be made to an individual signal point. This assignment is made by first considering the signal point 1 and comparing its polar angle with the polar angle of all the pad locations. If the minimum difference between the polar angle'for the signal point 1 and the polar angle of any of the pad locations is less than a threshold value, then the signal point 1 will be assigned that pad location. For example, if the signal point 1 has a polar angle a, and the pad location 60 has a polar angle 6,, then if the difference between these two angles is less than between the signal point and any other available pad and is less than a threshold angle, the pad location 60 will be assigned to the signal point 1. Assume, however, that the difference between the polar angle for the pad location 60 and the signal point 1 is greater than the threshold value. In this case, the signal point 1 will be passed and not assigned a pad location.

The assignment routine next considers signal point 2 and compares the polar angle of the signal point 2 with all the polar angles of the still-available pad locations. If the minimum difference between the angle of signal point 2 and any of the still available bonding pads is less than the first threshold level, then signal point 2 will be assigned that pad location. Assume that the absolute difference between the polar angle for the signal point 2 and the polar angle for the pad location 62 is less than the first threshold angle, A that is, a 3 is less than A,, and is less than the difierence between any other available signal point and the angle for pad location 62, then the pad location 62 will be assigned to the signal point 2. This routine continues until signal points 3 through 7 have been considered for the first threshold level.

Assume in the first pass signal points 2, 3, 5 and 6 were assigned conductive pad locations. Then, in the second pass, a new threshold angle will be established and signal points 1, 4 and 7 considered in the second pass. Again, the polar angle for the signal point 1 is compared with each of the polar angles for the unassigned input/output pad locations. If the polar angle a,-B,,,, is lessthan the difference between the polar angle of any other still available signal point and the pad location 60 and is less than A then the location 60 will be assigned to the signal point 1. Signal point 4 is considered next with the polar angle compared to the polar angles for the unassigned pad locations. If the minimum difference in the absolute magnitude between the polar angle for the signal point 4 and any of the unassigned pad locations is greater than A then the signal point 4 is passed in the second assignment pass. After considering point 4, the signal point 7 is considered. If the difference between the polar angle, relative to the polar coordinate center, established by the azimuth of the input/output signal point 7 and a reference axis and a polar angle, relative to the same center, established by the azimuth of an unassigned input/output pad location and the reference axis is less than the second threshold angle and less than the difference for any still available signal point and a bonding pad, then the signal point 7 will be assigned a pad location.

Assume that the pad location 69 is assigned to signal point 7 in the second pass; then only signal point 4 remains unassigned. A third threshold angle is established and the polar angle of point 4 again compared with the polar angles of the remaining unassigned pad locations. If the absolute value of the minimum difference between the polar angles of the signal point and still available bonding pads is less than A the third threshold angle, then the signal point 4 will be assigned to that pad location. Additional passes, however, may be required to assign a pad location to the signal point 4. With each pass, the threshold angle is increased. Eventually, all the signal points will be assigned to a pad location.

For the illustration of FIG. 3, table lV lists the signal points and the assigned pad locations as determined by the above described routine. In a data processing machine, representations associating each of the input/output signal points with the assigned pads would be generated and stored.

TABLE IV Signal Point Pad Number After assignment of all the input/output signal points to a bonding pad location, the next routine for generating a pattern to produce an integrated circuit is to generate and store representations of interconnecting paths between input/output component signal points and their assigned pad locations, illustrated in FIG. 4. input information for this section of the routine is given in table V by signal point number and conductive pad location.

Starting again with the lowest numbered signal point, signal point 1, an attempt is made to establish an interconnecting path to the assigned pad location, that is, pad location 60. To establish any interconnecting path between a signal point and its assigned pad location, two criteria must be satisfied; one, does the interconnecting path fit into the connecting channel under consideration, and, two, will that particular interconnecting path prevent connection to any other input/output signal point. If the first question is answered in the affirmative, and the second question in the negative, an interconnecting path is established.

Consider the concept of channels in which interconnecting paths may be located. Starting from the outer edge of the component array at which the signal points are located, there is a series of equally spaced, parallel areas in which conducting paths may be located without interfering with adjacent conductors. ln establishing interconnecting paths between input/output signal points and input/output bonding paths, the first channel will be located closest to the component edge. Subsequent conductive channels will be displaced from the first channel.

To construct the input information as given in table V, the components arranged on rows 50 and 52 are located in a coordinate axis as described with reference to FIG. 3. Both the x and y coordinates of the signal points 1 through 7 and the temporary x and y coordinates of the respective assigned pad locations 60, 62, 64, 69, 70, 72 and 73 must then be generated using the coordinate axis. The angle established by an azimuth through the various signal points and pad locations and the reference axis is carried over from the pad assignment routine.

With the information given in table V, signal point 1 is considered first along with the pad location 60. Since there are no other interconnecting paths in the first channel and a path from the point 1 to the pad location 60 will not interfere with subsequent interconnections, a representation is generated and stored establishing an interconnecting path 76 between the signal point 1 and the location 60. The end points and bend points of the path 76 are established by x and y coordinates taken from table V and stored information for the various channels.

After establishing the interconnecting paths 76, the signal point 2 is considered next along with the pad location 62. Since the first routing channel is being considered and the first criteria cannot be satisfied, an interconnecting path between the signal point 2 and the pad location 62 cannot be fit at this time due to the interconnecting path 76. Given this set of circumstances, the signal point 2 is skipped for the first pass and the routine proceeds to the signal point 3.

Since there are no previous interconnecting paths in channel one between the signal point 3 and the pad location 64, a representation of an interconnecting path will be generated and stored, again using x and y coordinates to locate the end points and bend points. Still considering the first routing channel, the signal point 4 is considered next. An interconnecting path will beestablished in the first pass between the signal point 4 and the pad location 73, since no other paths are in the first channel and the path 78 will not interfere with connections to other signal points. Signal points 5 also will be connected on the first pass because an interconnecting path 84 can be established to the pad location 72 in the first channel. Next, the routine will consider the signal point 6 to establish an interconnecting path to the pad location 70. The representation of the interconnecting path 80 between the signal point 6 and the pad location 70 will be generated and stored using the x and y coordinates to establish the end points and bend points. Still working on the first stacking channel, the signal point 7 cannot be interconnected since the path 80 has previously preempted the first channel.

On the second pass, the second stacking channel will be considered to determine if interconnections can be established between the remaining signal points that have not previously been interconnected to assigned pad locations. In the second pass, the signal point 2 will be considered first. An interconnecting path 82 will be established to the pad location 62. A coded representation of the path 82 will be stored for future fabrication of a pattern mask. After establishing the path 82, the signal point 7 and the path location 69 are next interconnected. The interconnecting path 86 between the point 7 and the path location 69 will be in the second stacking channel. The representation of the path 86 will be stored for future pattern fabrication.

in an integrated circuit configuration formed in and on a semiconductor substrate, the interconnecting path 86 will be formed partially from a metallic conductor and partially by a diffused area formed in the semiconductor substrate. This will be discussed in more detail later.

With completion of the interconnecting of input/output component signal points to assigned pads, all the representations required for generating patterns of an integrated circuit will have been completed. Referring to FIG. 5, there is shown a block diagram of a system for generating a set of pattern masks for fabrication of an integrated circuit. Each of the blocks 200, 202, 204 and 206 represent memory storage for retention of the representations generated. These memory storage areas are part of a computer 208, for example, a UNlVAC 1 108. Using the representations stored in the memories information is transferred from the computer 208 to a tape deck 210 for writing a magnetic tape 212 containing commands for generating a set of pattern masks.

To generate a set of pattern masks with the tape 212, the tape is read by a playback device 214 having an output connected to a drafting machine 216, for example, a CALCOMP Plotter. Commands on the tape 212 guide a cutter over a sheet of peal-coat material. The cutter outlines various circuit interconnections and component details. The tape 212 will be written in sections, each section containing information for one of the masks required to fabricate a given integrated circuit.

Referring to H0. 6, there is shown a circuit layout of an array interconnected by the routines described above. lnitially, active components (represented by blocks in the figure) are positioned in rows. Positioning of the component blocks is on the basis of producing the shortest interconnections between signal points on the various rows. Although the example of P16. 6 shows a three-row array, representations of the interconnections will be generated from a two-row model. Thus, when generating the interconnecting paths, the third row illustrated in FIG. 6 would be aligned with the first row with block 101 of the third row adjacent to block 103 of the first row. After the intrarow connections and interrow connections have been made, a linear transformation is performed to position the three rows as illustrated. 1n the linear transformation, the interconnecting paths are extended and bent as necessary. This produces the group of parallel lines to the left of the component rows. Not all circuit arrays will require three rows of components. For some circuits, only two rows will be required and in others, as many as four may be necessary. The routine for positioning component blocks determines the number of rows required on the basis of producing an overall array in the form of a square.

Assuming now that the component blocks have been located and that the third row is aligned with row one; the first routine described above with reference to FIG. 1 will establish the intrarow connections. For the purpose of establishing these connections. rows one and three will be considered as one continuous row. Thus, the examples described previously in F 16. 1-4 will be considered by a data processing machine. As explained, the longest interconnection will be considered first. For the first row (i.e. the composite of rows one and three) an interconnection will be made between the component block 109 and the component block 111; this being the longest interconnection in the first available channel. Next, the routine will consider all remaining connections to fit as many as possible in the first available channel. After filling the first channel, an interconnection will be made to establish the line 113 between the blocks 115 and 117. Note, that where the interconnection between the blocks 115 and 117 crosses the interconnection between blocks 109 and 111, the path will be a diffusion conductor (illustrated in dotted outline). Assuming that the circuit array will be fabricated into a semiconductor substrate using impurity diffusion, the dotted portions of the path 113 may be formed as diffusion conductors in the substrate. In an integrated circuit configuration, the path between the component blocks 115 and 117 will start as a metal conductor, change from a metal conductor to a diffusion conductor at a transfer point 113a (square areas are transfer points), tunnel under the previously established connection and return to a metal conductor by means of another transfer point. The interconnection 113 will continue in metal until in the area of the block 117. Here it again changes to a diffusion conductor for tunneling under the interconnecting path 105.

After all the signal points in the first layout row have been interconnected, signal points in the second row will be similarly interconnected. In this case, the first interconnection to be made in the first stacking channel will interconnect a signal point of the component block 112 to a signal point of the component block 114. Next, an interconnecting path 116 will be established in the second stacking channel from the component block 118 to the component block 120. Again, all the signal points on row two are considered for establishing an interconnection starting with the longest and proceeding to the shortest. For each pass, each interconnection will be considered to determine if there is space available in the channel under consideration for completing the interconnection. Note, that channels six and seven of the second row have five interconnections each.

For the simplified examples of FIGS. 3 and 4, it was assumed that all the input/output signal points were located along the outside edge of the component array. ln an actual circuit, however, such may not always be the case. The pad assignment routine, however, considers only points located along the outer edge of the component array. Thus, to interconnect an input/output signal point located on the inside edge of a component block, a special connection must be made to bring the point to the array edge. This is accomplished by using feed-through blocks which are merely conductors for establishing connections from the outside edge of the array to the channel areas. For example, consider the input/output signal point 122 in the component block 110. This point is interconnected to the input/output pad 124. To bring the point 122 out to the outer edge of the circuit array, a feedthrough block 126 is positioned adjacent the block 110. The interconnection between point 122 and the block 126 is then considered a connection between points in the same row and established during the first routine. These are very short interconnecting paths and considered last during each pass. In the second pass for establishing interconnections in the first row, a representation of the path between the signal point 122 and the block 126 was generated. Although this interconnection was considerably shorter than many remaining interconnections, it was placed in the second channel on a space-available basis.

Next, the interconnections between points on the first row (a composite of illustrated rows one and three) and row two will be established. One of the first interconnections that will be completed is between the component block 118 and the component block 1125}. Note, that this interconnecting path 129 starts from the block i128 and tunnels under two channels using a diffusion conductor and then changes to a metal conductor until aligned with the signal point of the block 118. It then changes at the point 30 to a diffusion conductor to tunnel under previously established metal conductors. Each of the unmade interconnections between the first and second rows will be considered during each pass of the routine for interrow connections commencing from the longest path and proceeding to the shortest path. This continues until all of the interconnections have been completed.

ln establishing some of the interconnections, a particular path may change from a metal conductor to a diffusion conductor a number of times. For example, consider the interconnecting path from the signal point 1131 of a component block M8 to the feed-through block 132. Starting from the block 118, the path i134 tunnels under previously established metal conductors as a diffusion conductor. It then changes to a metal conductor to a transfer point 136. Here it changes to diffusion conductor to tunnel under four parallel metal conductors. Again, a change is made to a metal conductor until it reaches the transfer point 1138. At the transfer point 1133 a connection is made to a diffusion conductor which carries the path to the feed-through block 132.

in determining whether to remain in diffusion or to return to metal where possible, the automatic data processor considers the condition that would result in the least capacitance to ground. A vertical path will be established as a metal conductor if, one, it crosses no horizontal metal and, two, the total capacitance of the transfer points and metal does not exceed the capacitance of a path remaining in diffusion. The critical value depends on factors including the conductor dimensions and the ratio of diffused capacitance to metal capacitance.

Upon completion of all the interrow connections, the linear transformation takes place to position the third row components as illustrated in FIG. 6. After the linear transformation, representations of power bussing lines 140, M2 and 143, to the left of the rows, will be generated and stored. Further, power bussing lines i144, M5 and M6 to the right of the component rows are also established. input/output signal points 148, 150 and R52 are defined for connecting the bussing lines to input/output pads.

The next routine to be performed on the circuit of FIG. 6 will be the assignment of input/output signal points to input/output pads. As explained previously, the assignment of signal points to pads is on the basis of a threshold angle. All the input/output signal points are located on the periphery of the component array. This is accomplished by using the feedthrough blocks, as explained, or extending conductors to the array periphery. For example, the conductor'lsd extends the point 156 to the array periphery.

Upon completion of the pad assignment, interconnecting paths between the input/output signal points and the assigned pad are generated. These interconnections are made on a numbered ordered basis starting with the first channel and filling each channel with as many interconnecting paths as possible in one pass. Subsequent passes complete interconnections, again on a numbered order, starting with the lowest numbered unassigned input/output signal point.

With the completion of interconnections between the input/output signal points and the input/output pads, all the representations necessary for laying out the circuit of HO. 6 will have been generated and stored.

Referring to H6. 7, there is shown a portion of an integrated circuit in section. Both conductors and active components are shown formed in the substrate 250. For example, the gate 252 and drain 254 of a field-effect transistor, along with conductor 256 and 258, are formed through an insulating layer 260 (e.g., silicon dioxide) into a semiconductor substrate 250, which may be, for example, silicon. Overlaying the insulating layer 260, metal conductors 262 and 264 and the gate region 266 of the field-effect transistor will be formed. To fabricate the various conductors and active components, the masks generated on the drafting machine 216 are successively employed.

It should be understood, that many active components will be formed simultaneously. The processes used to fabricate a circuit of the type illustrated in FIG. 7 include standard photographic and etching processes along with diffusions of impurities into a substrate. The various insulating layers and metal areas are formed using the set of masks generated by the present invention.

Having described the invention in terms of preferred embodiments, we claim:

1. The method of interconnecting signal, points by an automated data processing machine for active components arranged in rows comprising:

generating and storing representations of interconnecting paths between selected component signal points in a row in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, and

generating and storing representations of interconnecting paths between selected component signal points between rows in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path.

2. The method of interconnecting signal points by an automated data processing machine as set forth in claim 1 wherein the step of generating and storing representations of interconnecting paths between selective component signal points between rows includes arranging the interconnecting paths in a first category, a second category to be considered after completion of category one interconnections, and a third category to be considered after completion of the interconnections of categories one and two.

3. The method of interconnecting signal points by an automated data processing machine as set forth in claim 2 wherein the interconnections in category one are made in stacking channels associated with a first row of active components, the interconnections in category two are made in stacking channels associated with the active components in a second row, and the interconnections in category three are made in stacking channels associated with both rows of active components and are considered on a best fit" basis.

4. The method of interconnecting signal points by an automated data processing machine as set forth in claim 3 wherein an interconnecting path will be considered in category one if the interconnection can be made in stacking channels associated with the first component row and the connection does not interfere with a connection to any other signal point, an interconnecting path will be considered in category two if it can be made in a stacking channel associated with the second component row and it does not interfere with a connection to any other signal point, and an interconnecting path will be considered in category three if it cannot be placed in either of the other categories.

5. The method of interconnecting signal points by an automated data processing machine for active components arranged in rows in a semiconductor substrate, comprising:

generating and storing representations of interconnecting paths which include both conductors formed into the semiconductor substrate and metal conductors on the surface of said substrate between selected component signal points in a row and in order considering the longest interconnecting path first and proceeding to the shortest interconnecting path,

generating and storing representations of interconnecting paths which include both conductors formed into the semiconductor substrate and metal conductors on the surface of the substrate between selected component signal points between rows in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, and

generating circuit patterns from the representations of the interconnecting paths, one of said patterns representing the interconnecting paths to be formed into the semiconductor substrate, and another of said patterns outlining the metal conductors of the interconnecting paths.

6. The method of interconnecting signal points by an automated data processing machine as set forth in claim wherein the step of generating and storing representations of interconnecting paths between selective component signal points between rows includes arranging the interconnecting paths in a first category, a second category to be considered after completion of category one interconnections, and a third category to be considered after completion of the interconnections of categories one and two.

7. The method of interconnecting signal points by an automated data processing machine as set forth in claim 6 wherein the interconnections in category one are made in stacking channels associated with a first row of active components, the interconnections in category two are made in stacking channels associated with the active components in a second row, and the interconnections in category three are made in stacking channels associated with both rows of active components and are considered on a "best fit" basis.

8. The method of interconnecting signal points by an automated data processing machine as set forth in claim 7 wherein an interconnecting path will be considered in category one if the interconnection can be made in stacking channels associated with the first component row and the connection does not interfere with a connection to any other signal point, an interconnecting path will be considered in category two if it can be made in a stacking channel associated with the second component row and it does not interfere with a connection to any other signal point, and an interconnecting path will be considered in category three if it cannot be placed in either of the other categories.

9. The method of interconnecting signal points by an automated data processing machine comprising:

generating and storing representations of an arrangement of active components in rows formed into a semiconductor substrate through an insulating layer,

generating and storing representations of interconnecting paths stacked in a plurality of parallel channels between selected component signal points in a row in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, generating and storing representations of interconnecting paths stacked in a plurality of channels between selected component signal points between rows in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, and generating circuit fabricating patterns from the representations of active components and the interconnecting paths.

10. The method of interconnecting signal points as set forth in claim 9 wherein the generated and stored representations of interconnecting paths between selected component signal points in a row are arranged in an order starting from the longest interconnecting path and then selected to maximize the use of a first of said plurality of channels and then starting with the remaining longest interconnecting paths and selecting paths to maximize the use of a second plurality of channels and proceeding in the same order until all the interconnecting paths are fit into the plurality of channels.

11. The method 0 interconnecting signal points by an automated data processing machine as set forth in claim 9 wherein the step of generating and storing representations of interconnecting paths between selective component signal points between rows includes arranging the interconnecting paths in a first category, a second category to be considered after completion of category one interconnections, and a third category to be considered after completion of the interconnections of categories one and two.

12. The method of interconnecting signal points by an automated data processing machine as set forth in claim 11 wherein the generated and stored representations of interconnecting paths between selected component signal points in category one are considered in an order proceeding from the longest of said interconnecting paths and then selected to maximize the use of the first plurality of channels associated with the first row of active components, and then starting with the remaining longest interconnecting paths and selecting paths to maximize the use of the second of said plurality of channels, and continuing in the same order until all the interconnecting paths of category one have been fit into the plurality of channels.

13. The method of interconnecting signal points by an automated data processing machine as set forth in claim 12 wherein the generated and stored representations of interconnecting paths between selected component signal points in category two are considered in an order proceeding from the longest of said interconnecting paths and then selected to maximize the use of the first plurality of channels associated with the second row of active components, and then starting with the remaining longest interconnecting paths and selecting paths to maximize the use of the second of said plurality of channels, and continuing in the same order until all the interconnecting paths of category two have been fit into the plurality of channels.

14. The method of interconnecting signal points by an automated data processing machine as set forth in claim 13 wherein the generated and stored representations of interconnecting paths between selected component signal points between rows in category three are considered in an order proceeding from the longest of said interconnecting paths and then selected to maximize the use of the first of the unused plurality of channels for either of the active component rows. and then starting with the remaining longest interconnecting path of category three, selecting paths to maximize the use of the second available channel, and continuing in the same order until all the interconnecting paths of category three have been fit into the plurality of channels.

15. The method of interconnecting signal points as set forth in claim 14 wherein the first plurality of channels for the interconnecting paths between selected component signal points between rows starts from the last plurality of channels for interconnecting paths between selected components in a row.

16. The method of interconnecting signal points as set forth in claim 15 wherein the generated and stored representations of the interconnecting paths are separated into areas formed into the semiconductor substrate and conductors formed by metallization on said insulating layer. 

1. The method of interconnecting signal points by an automated data processing machine for active components arranged in rows comprising: generating and storing representations of interconnecting paths between selected component signal points in a row in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, and generating and storing representations of interconnecting paths between selected component signal points between rows in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path.
 2. The method of interconnecting signal points by an automated data processing machine as set forth in claim 1 wherein the step of generating and storing representations of interconnecting paths between selective component signal points between rows includes arranging the interconnecting paths in a first category, a second category to be considered after completion of category one interconnections, and a third category to be considered after completion of the interconnections of categories one and two.
 3. The method of interconnecting signal points by an automated data processing machine as set forth in claim 2 wherein the interconnections in category one are made in stacking channels associated with a first row of active components, the interconnections in category two are made in stacking channels associated with the active components in a second row, and the interconnections in category three are made in stacking channels associated with both rows of active components and are considered on a ''''best fit'''' basis.
 4. The method of interconnecting signal points by an automated data processing machine as set forth in claim 3 wherein an interconnecting path will be considered in category one if the interconnection can be made in stacking channels associated with the first component row and the connection does not interfere with a connection to any other signal point, an interconnecting path will be considered in category two if it can be made in a stacking channel associated with the second component row and it does not interfere with a connection to any other signal point, and an interconnecting path will be considered in category three if it cannot be placed in either of the other categories.
 5. The method of interconnecting signal points by an automated data processing machine for active compOnents arranged in rows in a semiconductor substrate, comprising: generating and storing representations of interconnecting paths which include both conductors formed into the semiconductor substrate and metal conductors on the surface of said substrate between selected component signal points in a row and in order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, generating and storing representations of interconnecting paths which include both conductors formed into the semiconductor substrate and metal conductors on the surface of the substrate between selected component signal points between rows in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, and generating circuit patterns from the representations of the interconnecting paths, one of said patterns representing the interconnecting paths to be formed into the semiconductor substrate, and another of said patterns outlining the metal conductors of the interconnecting paths.
 6. The method of interconnecting signal points by an automated data processing machine as set forth in claim 5 wherein the step of generating and storing representations of interconnecting paths between selective component signal points between rows includes arranging the interconnecting paths in a first category, a second category to be considered after completion of category one interconnections, and a third category to be considered after completion of the interconnections of categories one and two.
 7. The method of interconnecting signal points by an automated data processing machine as set forth in claim 6 wherein the interconnections in category one are made in stacking channels associated with a first row of active components, the interconnections in category two are made in stacking channels associated with the active components in a second row, and the interconnections in category three are made in stacking channels associated with both rows of active components and are considered on a ''''best fit'''' basis.
 8. The method of interconnecting signal points by an automated data processing machine as set forth in claim 7 wherein an interconnecting path will be considered in category one if the interconnection can be made in stacking channels associated with the first component row and the connection does not interfere with a connection to any other signal point, an interconnecting path will be considered in category two if it can be made in a stacking channel associated with the second component row and it does not interfere with a connection to any other signal point, and an interconnecting path will be considered in category three if it cannot be placed in either of the other categories.
 9. The method of interconnecting signal points by an automated data processing machine comprising: generating and storing representations of an arrangement of active components in rows formed into a semiconductor substrate through an insulating layer, generating and storing representations of interconnecting paths stacked in a plurality of parallel channels between selected component signal points in a row in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, generating and storing representations of interconnecting paths stacked in a plurality of channels between selected component signal points between rows in an order considering the longest interconnecting path first and proceeding to the shortest interconnecting path, and generating circuit fabricating patterns from the representations of active components and the interconnecting paths.
 10. The method of interconnecting signal points as set forth in claim 9 wherein the generated and stored representations of interconnecting paths between selected component signal points in a row are arranged in an order starting from the longest interconnecting path and then selected tO maximize the use of a first of said plurality of channels and then starting with the remaining longest interconnecting paths and selecting paths to maximize the use of a second plurality of channels and proceeding in the same order until all the interconnecting paths are fit into the plurality of channels.
 11. The method of interconnecting signal points by an automated data processing machine as set forth in claim 9 wherein the step of generating and storing representations of interconnecting paths between selective component signal points between rows includes arranging the interconnecting paths in a first category, a second category to be considered after completion of category one interconnections, and a third category to be considered after completion of the interconnections of categories one and two.
 12. The method of interconnecting signal points by an automated data processing machine as set forth in claim 11 wherein the generated and stored representations of interconnecting paths between selected component signal points in category one are considered in an order proceeding from the longest of said interconnecting paths and then selected to maximize the use of the first plurality of channels associated with the first row of active components, and then starting with the remaining longest interconnecting paths and selecting paths to maximize the use of the second of said plurality of channels, and continuing in the same order until all the interconnecting paths of category one have been fit into the plurality of channels.
 13. The method of interconnecting signal points by an automated data processing machine as set forth in claim 12 wherein the generated and stored representations of interconnecting paths between selected component signal points in category two are considered in an order proceeding from the longest of said interconnecting paths and then selected to maximize the use of the first plurality of channels associated with the second row of active components, and then starting with the remaining longest interconnecting paths and selecting paths to maximize the use of the second of said plurality of channels, and continuing in the same order until all the interconnecting paths of category two have been fit into the plurality of channels.
 14. The method of interconnecting signal points by an automated data processing machine as set forth in claim 13 wherein the generated and stored representations of interconnecting paths between selected component signal points between rows in category three are considered in an order proceeding from the longest of said interconnecting paths and then selected to maximize the use of the first of the unused plurality of channels for either of the active component rows, and then starting with the remaining longest interconnecting path of category three, selecting paths to maximize the use of the second available channel, and continuing in the same order until all the interconnecting paths of category three have been fit into the plurality of channels.
 15. The method of interconnecting signal points as set forth in claim 14 wherein the first plurality of channels for the interconnecting paths between selected component signal points between rows starts from the last plurality of channels for interconnecting paths between selected components in a row.
 16. The method of interconnecting signal points as set forth in claim 15 wherein the generated and stored representations of the interconnecting paths are separated into areas formed into the semiconductor substrate and conductors formed by metallization on said insulating layer. 